The ultimate solution for a complete wafer processing workflow. Seamlessly integrate Apogee® process modules to streamline operations. Enhance safety, enjoy convenience, and maximize productivity from day one.
Mix and match Apogee® process modules to create a tailored, high-performance workflow for coating, baking, or developing.
Eliminate the complexities of sourcing from multiple vendors with a fully customizable solution to streamline your semiconductor processing. Built-in fume control, dedicated chemical storage, and ergonomic design offer the perfect alternative to traditional wet benches. Delivered fully assembled, tested, and ready to run; simply plug it in and start working.
Engineered for superior performance, usability, versatility—and peace of mind.
On-board 7-inch color touchscreen with DataStream™ OS included for visibility and your ease-of-use.
Dispense manually with syringes, pipettes, or choose from multiple automated options.
A brushless motor and indirect drive with oversized bearings/belt provide unmatched uptime, thermal isolation, and performance.
The built-in spindle fluid deflector keeps liquids out of your drive train and bearings, without purge gases.
Integrated PFA fluid trap protects your vacuum components and pumps from unwanted contamination and blockage.
Sophisticated fluid separator evacuates chemical fumes while safely guiding fluid waste to the drain.
Knowledge is power. With DataStream™ technology, monitor and manage in real time, ensuring production-quality results from anywhere. Proactive warnings and detailed log files give you the information you need to succeed.
Process parameters and measurements are logged in real-time. Export in multiple formats for analysis, troubleshooting, and process optimization.
Access your Apogee® Spin Coater remotely via any web browser for real-time monitoring, adjustments, and recipe management. Create, modify, upload, download, and archive recipes seamlessly.
NRTL certification is crucial for semiconductor equipment, ensuring compliance with safety standards set by regulatory bodies like OSHA and ANSI.
Cee® spin coaters are NRTL listed right out of the box…
…your safety department is going to love you.
When advanced processes require advanced features, Cee® has you covered. Personalize your spin coater right from the factory.
Discover a whole new level of control with AccuScan™ Dispense; a programmable scanning arm offering precision dispense and edge bead removal.
Control is confidence. Eliminate exhaust fluctuations and adjust for varying process needs. Safeguard your process with the Optiflow™ Exhaust Management System.
Challenge accepted! Any size, shape, material, or design, Cee® tailored spin chucks are expertly matched to your substrates.
200mm Round or 6″ x 6″ Square
12,000 rpm
30,000 rpm/s
< 0.2 rpm
< 0.2 rpm/s
< 0.2 rpm
7″ Full Color Touchscreen (included)
Unlimited / Unlimited
0.1 s
40 lb (kg)
65 lb (29.5kg)
W: 13.25″ (337mm)
D: 21″ (533mm)
H: 13.25″ (337mm)
W: 28″ (712mm)
D: 28″ (712mm)
H: 29″ (737mm)
100-120 or 208-230 VAC
3/4″ OD
6A (max)
1″ OD
1/4″ Push to Connect, <33kPa abs
70psi (482kPa)
W: 13.25″ (337mm) W
D: 21″ (533mm) D
H: 13.25″ (337mm) H
With four decades of experience, our experts will collaborate closely with you to understand your requirements and deliver solutions that exceed expectations.
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Cee® is a registered trademark of Cost Effective Equipment, LLC.
